Serpengüzel, AliAydınlı, AtillaBek, Alpan2016-02-082016-02-0819980277-786Xhttp://hdl.handle.net/11693/27665Date of Conference: 24-30 January 1998Conference Name: SPIE Optoelectronics and High-Power Lasers and Applications, 1998Fabry-Perot microcavities are used for the alteration of photoluminescence in hydrogenated amorphous silicon nitride grown with and without ammonia. The photoluminescence is red-near-infrared for the samples grown without ammonia, and blue-green for the samples grown with ammonia. In the Fabry- Perot microcavities, the amplitude of the photoluminescence is enhanced, while its linewidth is reduced with respect to the bulk hydrogenated amorphous silicon nitride. The microcavity was realized by a metallic back mirror and a hydrogenated amorphous silicon nitride - air or a metallic front mirror. The transmittance, reflectance, and absorbance spectra were also measured and calculated. The calculated spectra agree well with the experimental spectra. The hydrogenated amorphous silicon nitride microcavity has potential for becoming a versatile silicon based optoelectronic device such as a color flat panel display, a resonant cavity enhanced light emitting diode, or a laser.EnglishAmorphous siliconFabry-PerotMicrocavityOptoelectronicsPhotoluminescencePlasma enhanced chemical vapor depositionResonatorsSpontaneous emissionThin filmsConference Paper10.1117/12.316689