Ozer, Z.Mamedov, Amirullah M.Özbay, Ekmel2016-02-082016-02-082013-09-230015-0193http://hdl.handle.net/11693/27898This paper presents the design and modeling of micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT) based by using finite element model (FEM) simulation. The conceptual framework establishes five steps to perform the critical analysis: design a novel structure, define the failure mechanisms under the given conditions, analyze different vibrations, analyze the operation principle, and detect resonance modes. In addition, MEMS failure modes were analyzed under different scenarios and the obtained results discussed. Copyright © Taylor & Francis Group, LLC.EnglishFEMFerroelectricsGyroscopeConceptual frameworksCritical analysisDesign and modelingFailure mechanismFerroelectric compoundsMicro-gyroscopeModel and simulationNovel structuresComputer simulationFerroelectricityFinite element methodGyroscopesMEMSFerroelectric materialsArticle10.1080/00150193.2013.8210021563-5112