Perçin, G.Atalar, AbdullahDegertekin, L.Khuri-Yakub, B. T.2015-07-282015-07-281998-03-160003-6951http://hdl.handle.net/11693/10991This letter presents micromachined two-dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report on an optimum design for an individual array element based on finite element modeling. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz. Such an array could be combined with on-board driving and an addressing circuitry for different applications.EnglishMicromachined two-dimensional arrayArticle10.1063/1.121067