Dönmez, İ.Ozgit-Akgun, C.Bıyıklı, N.2019-07-092019-07-092012http://hdl.handle.net/11693/52151Date of Conference: 17-20 June 2012EnglishPlasma-enhanced atomic layer deposition of gallium oxide and indium gallium oxide (IGO) thin filmsConference Paper