Deniz, H.Khudiyev, T.Buyukserin, F.Bayındır, Mehmet2015-07-282015-07-2820110003-6951http://hdl.handle.net/11693/13329Ordered arrays of subwavelength hydrogen silsesquioxane (HSQ) nanorods on glass substrates are fabricated using room temperature nanoimprint lithography and anodized aluminum oxide membranes. Moth-eye type nanorod arrays exhibited superior omnidirectional antireflection characteristics in visible wavelengths. The ellipsometric measurements revealed that average specular reflection is remaining below 1% up to 55 degrees incidence angles. Transmission measurements at normal incidence resulted in significant increase in transmitted light intensity with respect to plain glass. Simulations showed that up to 99% transmission could be obtained from double sided tapered HSQ nanorod arrays on HSQ thin film and glass substrates. Achieving large-area, broadband and omnidirectional antireflective surfaces on glass pave the way for applications including photovoltaics. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3657766]EnglishArticle10.1063/1.3657766