Aydoğdu, ElifÖzgürlük, AlperOğuz, H. KağanAtalar, AbdullahKocabaş, CoşkunKöymen, Hayrettin2016-02-082016-02-0820121948-5719http://hdl.handle.net/11693/28106Date of Conference: 7-10 October 2012An equivalent electrical circuit model valid for collapsed mode operation of CMUT is described. The across and through variables of the circuit model are chosen to be rms force and rms displacement over the surface of the CMUT membrane. The relation between rms displacement and applied voltage is obtained through analytical calculations utilizing the exact force distribution. The radiation impedance of collapsed mode CMUT is included as a load impedance in the circuit model. The resulting equivalent circuit is merged with uncollapsed mode model, to obtain a simulation tool that covers the whole operation range of CMUT. © 2012 IEEE.EnglishAnalytical calculationApplied voltagesCircuit modelingEquivalent electrical circuit modelForce distributionsNonlinear equivalent circuitRadiation impedanceRMS displacementsCircuit theoryCircuit simulationConference Paper10.1109/ULTSYM.2012.0247