Sabet, Rana AsgariIshraq, AqiqTokel, Onur2022-01-282022-01-282021-09-30978-1-6654-4804-8http://hdl.handle.net/11693/76878Conference Name: 2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)Date of Conference: 21-25 June 2021Here, we introduce the first controlled nanofabrication capability in the bulk of silicon wafers. We exploit smart use of Bessel beams and demonstrate "in-chip" nano-structuring with features lower than 250 nm.EnglishConference Paper10.1109/CLEO/Europe-EQEC52157.2021.9542673978-1-6654-1876-8