Şahin, O.Yaralıoğlu, G.Grow, R.Zappe, S. F.Atalar, AbdullahQuate, C.Solgaard, O.2016-02-082016-02-082003-06http://hdl.handle.net/11693/27548Date of Conference: 8-12 June 2003Conference name: TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical PapersWe present a micromachined scanning probe cantilever, in which a specific higher order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have demonstrated that such cantilevers enable sensing of nonlinear mechanical interactions between the atomically sharp tip at the free end of the cantilever and a surface with unknown mechanical properties in tapping-mode atomic force microscopy.EnglishNanobioscienceResonant frequencyActuatorsAtomic force microscopyElasticityMicrosystemsNanocantileversNatural frequenciesProbesResonanceSurface topographyTransducersVibrations (mechanical)Fundamental resonance frequencyMechanical factorsMechanical interactionsNanobiosciencesNanomechanical sensingOptical imagingTapping-mode atomic force microscopyVibrationsSolid-state sensorsConference Paper10.1109/SENSOR.2003.1216967