Browsing Acoustics and Underwater Technologies Research Center (BASTA) by Type "Conference Paper"
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Item Open AccessBeam steering in a half-frequency driven airborne CMUT transmitter array(IEEE Computer Society, 2019) Khan, Talha Masood; Taşdelen, Akif Sinan; Yılmaz, Mehmet; Atalar, Abdullah; Köymen, Hayrettin; Khan, Talha Masood; Taşdelen, Akif Sinan; Yılmaz, Mehmet; Atalar, Abdullah; Köymen, HayrettinAn airborne Capacitive Micromachined Ultrasonic Transducer (CMUT) transmit array was designed using electromechanical modelling for unbiased airborne operation. The array elements are designed for maximum swing at 10V p-p unbiased drive, whereas conventional practice is to bias CMUT close to the collapsed voltage to achieve higher swing. The devices were fabricated using a customized single photolithographic process with a combination of wet and dry etching. The wafer level fabrication enabled the usage of 2x2 and 3x3 arrays. Driving CMUTs in an unbiased mode at half frequency drives the ‘static pressure’ depressed silicon membrane at a larger swing without letting it collapse. The 2x2 array displays 3.375 kHz bandwidth when characterized in air. The phase and amplitude differences due to the dispersion of resonance frequencies of the elements are compensated for beamformed and beamsteered airborne operation. Item Open AccessMic-in-CMOS: CMUT as a sealed-gap capacitive microphone(IEEE, 2020) Köymen, Hayrettin; Ahiska, Y.; Atalar, Abdullah; Köymen, I.; Taşdelen, A .Sinan; Yılmaz, Mehmet; Köymen, Hayrettin; Atalar, Abdullah; Taşdelen, A .Sinan; Yılmaz, MehmetThe design and production of a CMOS compatible, watertight and ingress-proof CMUT (capacitive micromachined ultrasonic transducer) microphone, mic-in-CMOS, with vacuum-gap is described. We present an analytical model-based approach for the design of mic-in-CMOS, where a basis for quantitative comparison of performance trade-offs is provided. The sealed vacuum gap of the mic-in-CMOS is basically a lossless sensor, free of mechanical noise. Its SNR is determined by the noise of the pre-amplification electronics (the noise contributor in a CMUT with vacuum gap is essentially the radiation resistance, which is less than 0 dBA for audio band for a 1 mm2 device). The design of mic-in-CMOS involves many multilateral trade-offs such as gap height vs membrane thickness vs sensitivity vs need for linear operation vs bias voltage and atmospheric depression, to name few. The mic-inCMOS design can be mass produced using CMOS film stacks only, as such the fabrication process can be carried out entirely in a CMOS processes production line complemented with CMOS compatible post-processing approaches. Mic-inCMOS has the advantage of low production cost with minimal packaging requirement and on-die EMI / EMC. Item Open AccessTransmitting CMUT arrays without a DC bias(IEEE Computer Society, 2019) Enhoş, Kerem; Taşdelen, Akif Sinan; Yılmaz, Mehmet; Atalar, Abdullah; Köymen, Hayrettin; Enhoş, Kerem; Taşdelen, Akif Sinan; Yılmaz, Mehmet; Atalar, Abdullah; Köymen, HayrettinThis study focuses on design, simulation, fabrication and measurement of transmitting CMUT arrays with unbiased mode of operation. We presented a design procedure considering the radiation pattern, Rayleigh distance and the parameters of the large signal equivalent circuit, which can be applied for different operation frequencies and applications. Large signal equivalent circuit model is used for lumped-element simulations. Harmonic balance and transient analyses are carried out with Gaussian enveloped tone burst, sinusoidal and pulse width modulation (PWM) signals with different duty cycles. Outputs of these simulations are fed in beamforming toolboxes for further verification. According to the design specifications transmitting CMUT arrays are fabricated. Corresponding experimental impedance measurements are conducted.