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dc.contributor.advisorAtalar, Abdullahen_US
dc.contributor.authorTaş, Vahdettinen_US
dc.date.accessioned2016-07-01T11:10:04Z
dc.date.available2016-07-01T11:10:04Z
dc.date.issued2009
dc.identifier.urihttp://hdl.handle.net/11693/29989
dc.descriptionCataloged from PDF version of article.en_US
dc.description.abstractRecent progresses in Radio Frequency Micro Electro Mechanical Sensors (RF MEMS) area have shown promising results to replace the off-chip High-Q macroscopic mechanical components that are widely used in the communication technology. Vibrating micromechanical silicon resonators have already shown quality factors (Q) over 10,000 at radio frequencies. Micromechanical filters and oscillators have been fabricated based on the high-Q micro-resonator blocks. Their fabrication processes are compatible with CMOS technology. Therefore, producing fully monolithic transceivers can be possible by fabricating the micromechanical components on the integrated circuits. In this work, we examine the general characteristics of micromechanical resonators and propose a novel low loss resonator type and a promising filter prototype. High frequency micromechanical components suffer from the anchor loss which limit the quality factor of these devices. We have developed a novel technique to reduce the anchor loss in extensional mode resonators. Fabrication processes of the suggested structures are relatively easy with respect to the current high-Q equivalents. The anchor loss reduction technique does not introduce extra complexities to be implemented in the existing structures.en_US
dc.description.statementofresponsibilityTaş, Vahdettinen_US
dc.format.extentxii, 71 leaves, graphics, tablesen_US
dc.language.isoEnglishen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectMicromechanical Resonatorsen_US
dc.subjectMicromechanical Filtersen_US
dc.subjectHigh-Q Resonatoren_US
dc.subjectAcoustic Transmission Linesen_US
dc.subjectAnchor Lossen_US
dc.subject.lccQC176.8.M5 T37 2009en_US
dc.subject.lcshMicromechanics.en_US
dc.titleHigh-Q micromechanical resonators and filters for ultra high frequency applicationsen_US
dc.typeThesisen_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.publisherBilkent Universityen_US
dc.description.degreeM.S.en_US
dc.identifier.itemidBILKUTUPB117469


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