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dc.contributor.authorOlcum, S.en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorKöymen H.en_US
dc.contributor.authorOguz, K.en_US
dc.contributor.authorSenlik, M.N.en_US
dc.date.accessioned2016-02-08T11:42:01Z
dc.date.available2016-02-08T11:42:01Z
dc.date.issued2007en_US
dc.identifier.issn10510117
dc.identifier.urihttp://hdl.handle.net/11693/27017
dc.description.abstractIn this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers. © 2007 IEEE.en_US
dc.language.isoEnglishen_US
dc.source.titleProceedings - IEEE Ultrasonics Symposiumen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/ULTSYM.2007.536en_US
dc.subjectCapacitive micromachined ultrasonic transducersen_US
dc.subjectcMUTen_US
dc.subjectElectroacoustic transducersen_US
dc.subjectExperimentsen_US
dc.subjectFlow of fluidsen_US
dc.subjectMicromachiningen_US
dc.subjectOptical designen_US
dc.subjectTransducersen_US
dc.subjectUltrasonic equipmenten_US
dc.subjectUltrasonic measurementen_US
dc.subjectUltrasonic wavesen_US
dc.subjectUltrasonicsen_US
dc.subjectCapacitive micromachined ultrasonic transducersen_US
dc.subjectcMUTen_US
dc.subjectExperimental characterizationen_US
dc.subjectFabricated devicesen_US
dc.subjectPitch-catchen_US
dc.subjectPulse echoesen_US
dc.subjectSurface micromachining processesen_US
dc.subjectTesting proceduresen_US
dc.subjectUltrasonic transducersen_US
dc.titleExperimental characterization of capacitive micromachined ultrasonic transducersen_US
dc.typeConference Paperen_US
dc.departmentDepartment of Electrical and Electronics Engineering
dc.citation.spage2131en_US
dc.citation.epage2134en_US
dc.identifier.doi10.1109/ULTSYM.2007.536en_US


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