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      Parametric linear modeling of circular cMUT membranes in vacuum

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      Author
      Köymen, Hayrettin
      Şenlik, M. N.
      Atalar, Abdullah
      Olcum, S.
      Date
      2007
      Source Title
      IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
      Print ISSN
      0885-3010
      Electronic ISSN
      1525-8955
      Publisher
      Institute of Electrical and Electronics Engineers
      Volume
      54
      Issue
      6
      Pages
      1229 - 1239
      Language
      English
      Type
      Article
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      Abstract
      We present a lumped element parametric model for the clamped circular membrane of a capacitive micromachined ultrasonic transducer (cMUT). The model incorporates an electrical port and two sets of acoustic ports, through which the cMUT couples to the medium. The modeling approach is based on matching a lumped element model and the mechanical impedance of the cMUT membrane at the resonance frequencies in vacuum. Very good agreement between finite element simulation results and model impedance is obtained. Equivalent circuit model parameters can be found from material properties and membrane dimensions without a need for finite element simulation.
      Permalink
      http://hdl.handle.net/11693/23453
      Published Version (Please cite this version)
      http://doi.org/10.1109/TUFFC.2007.376
      Collections
      • Department of Electrical and Electronics Engineering 3524
      • Institute of Materials Science and Nanotechnology (UNAM) 1775
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