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dc.contributor.authorOzgurluk, A.en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorKöymen, H.en_US
dc.contributor.authorOlçum, S.en_US
dc.date.accessioned2016-02-08T09:46:08Z
dc.date.available2016-02-08T09:46:08Z
dc.date.issued2012en_US
dc.identifier.issn0885-3010
dc.identifier.urihttp://hdl.handle.net/11693/21426
dc.description.abstractThe radiation impedance of a capacitive micromachined ultrasonic transducer (CMUT) array is a critical parameter to achieve high performance. In this paper, we present a calculation of the radiation impedance of collapsed, clamped, circular CMUTs both analytically and using finite element method (FEM) simulations. First, we model the radiation impedance of a single collapsed CMUT cell analytically by expressing its velocity profile as a linear combination of special functions for which the generated pressures are known. For an array of collapsed CMUT cells, the mutual impedance between the cells is also taken into account. The radiation impedances for arrays of 7, 19, 37, and 61 circular collapsed CMUT cells for different contact radii are calculated both analytically and by FEM simulations. The radiation resistance of an array reaches a plateau and maintains this level for a wide frequency range. The variation of radiation reactance with respect to frequency indicates an inductance-like behavior in the same frequency range. We find that the peak radiation resistance value is reached at higher kd values in the collapsed case as compared with the uncollapsed case, where k is the wavenumber and d is the center-to-center distance between two neighboring CMUT cells.en_US
dc.language.isoEnglishen_US
dc.source.titleIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Controlen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/TUFFC.2012.2321en_US
dc.subjectCapacitive micromachined ultrasonic transduceren_US
dc.subjectContact radiusen_US
dc.subjectCritical parameteren_US
dc.subjectFEM simulationsen_US
dc.subjectFinite element method simulationen_US
dc.subjectFrequency rangesen_US
dc.subjectLinear combinationsen_US
dc.subjectMutual impedanceen_US
dc.subjectRadiation impedanceen_US
dc.subjectRadiation resistanceen_US
dc.subjectSpecial functionsen_US
dc.subjectVelocity profilesen_US
dc.subjectWave numbersen_US
dc.subjectWide frequency rangeen_US
dc.subjectCellsen_US
dc.subjectCytologyen_US
dc.subjectFinite element methoden_US
dc.subjectTransducersen_US
dc.subjectUltrasonic transducersen_US
dc.subjectRadiationen_US
dc.titleRadiation impedance of collapsed capacitive micromachined ultrasonic transducersen_US
dc.typeArticleen_US
dc.departmentDepartment of Electrical and Electronics Engineering
dc.citation.spage1301en_US
dc.citation.epage1308en_US
dc.citation.volumeNumber59en_US
dc.citation.issueNumber6en_US
dc.identifier.doi10.1109/TUFFC.2012.2321en_US
dc.publisherInstitute of Electrical and Electronics Engineersen_US


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