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      •   BUIR Home
      • University Library
      • Bilkent Theses
      • Theses - Department of Mechanical Engineering
      • Dept. of Mechanical Engineering - Master's degree
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      Design, fabrication, and applications of multi-mode nanoelectromechanical systems 

      Arı, Atakan Bekir (Bilkent University, 2017-07)
      Miniaturization of systems allowed wide spread consumer use of microelectronics, integrated circuits and MEMS based sensors. Thanks to the advancement in microfabrication methods, it is possible to build structures with ...

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      AuthorArı, Atakan Bekir (1)KeywordsElectron Beam Lithography (1)
      Electrothermal Actuation (1)
      Energy Sinks (1)
      Mode-Coupling (1)
      Nanofabrication (1)
      Nanomechanics (1)
      NEMS (1)
      Piezoresistive Down-Mixing (1)Quality Factor Modulation (1)Reactive Ion Etching (1)... View MoreDate Issued2017 (1)Has File(s)Yes (1)

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