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Silicon oxynitride layers for applications in optical waveguides
(Bilkent University, 2000)
Silicon based dielectrics : growth, characterization, and applications in integrated optics
(Bilkent University, 2005)
In recent years, growing attention has been paid to silicon based dielectrics, such as silicon oxynitrides, silicon nitrides, and semiconductor doped silicon oxides, all combined under the name silica on silicon technology. ...