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      Surface integrated membrane nanomechanical and microwave coplanar waveguide based biosensors 

      Aslanbaş, Levent (Bilkent University, 2018-08)
      Nanoelectromechanical Systems, or NEMS, is the further miniaturized extension of novel devices of 40 years ago, Microelectromechanical Systems or MEMS in short. Nano scale devices first appeared at the dawn of 21st century ...

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      Author
      Aslanbaş, Levent (1)
      Keywords
      Coplanar Waveguides (1)
      Exosome Characterization (1)
      KOH Etching Of Silicon (1)
      Microfabrication (1)
      Nanofabrication (1)
      NEMS (1)
      Silicon Nitrade Membrane (1)
      Surface İntegrated Membranes (1)
      ... View MoreDate Issued
      2018 (1)
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      Thesis (1)
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      Yes (1)

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