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Surface integrated membrane nanomechanical and microwave coplanar waveguide based biosensors
(Bilkent University, 2018-08)
Nanoelectromechanical Systems, or NEMS, is the further miniaturized extension of novel devices of 40 years ago, Microelectromechanical Systems or MEMS in short. Nano scale devices first appeared at the dawn of 21st century ...