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Integrated micro ring resonator displacement sensor for scanning probe microscopies
(Institute of Physics Publishing, 2004)
We describe a novel displacement sensor for scanning probe microscopies using an integrated optical micro ring resonator. This device operates by means of monitoring the changes in the transmission spectrum of a high finesse ...
Pressure sensing using micromachined asymmetric integrated vertical coupler
Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.
Novel integrated optical displacement sensor for scanning force microscopies
A novel displacement sensor for scanning force microscoples using an integrated optical micro-ring resonator is described. Device operates by monitoring the changes in transmission spectrum of micro-ring resonator. This ...