Design of a High-Resolution Microfluidic Microwave Mems Phase Shifter
Microwave and Optical Technology Letters
Ozbey, B., Ozturk, S., & Aktas, O. (2011). Design of a high‐resolution microfluidic microwave MEMS phase shifter. Microwave and Optical Technology Letters, 53(8), 1902-1905.
Please cite this item using this persistent URLhttp://hdl.handle.net/11693/13382
In this article, a novel microwave microelectromechanical phase shifter based on a microfluidic design is proposed and demonstrated. The design principles, the fabrication process, and experimental results (S-parameters and phase shift plots) are presented. The proposed system has a high bandwidth, high-power handling capacity, and a high-resolution along with a small settling time. (C) 2011 Wiley Periodicals, Inc.