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dc.contributor.authorOzgit Akgun, C.en_US
dc.contributor.authorKayaci, F.en_US
dc.contributor.authorDonmez, I.en_US
dc.contributor.authorUyar, T.en_US
dc.contributor.authorBiyikli, N.en_US
dc.date.accessioned2015/07/28en_US
dc.date.accessioned2015-07-28T12:04:18Z
dc.date.available2015-07-28T12:04:18Z
dc.date.issued2013-11-09en_US
dc.identifier.citationOzgit‐Akgun, C., Kayaci, F., Donmez, I., Uyar, T., & Biyikli, N. (2013). Template‐Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma‐Enhanced Atomic Layer Deposition. Journal of the American Ceramic Society, 96(3), 916-922.en_US
dc.identifier.issn0002-7820en_US
dc.identifier.urihttp://hdl.handle.net/11693/13007
dc.descriptionCataloged from PDF version of article.en_US
dc.description.abstractAluminum nitride (AlN) hollow nanofibers were synthesized via plasma-enhanced atomic layer deposition using sacrificial electrospun polymeric nanofiber templates having different average fiber diameters (~70, ~330, and ~740 nm). Depositions were carried out at 200°C using trimethylaluminum and ammonia precursors. AlN-coated nanofibers were calcined subsequently at 500°C for 2 h to remove the sacrificial polymeric nanofiber template. SEM studies have shown that there is a critical wall thickness value depending on the template's average fiber diameter for AlN hollow nanofibers to preserve their shapes after the template has been removed by calcination. Best morphologies were observed for AlN hollow nanofibers prepared by depositing 800 cycles (corresponding to ~69 nm) on nanofiber templates having ~330 nm average fiber diameter. TEM images indicated uniform wall thicknesses of ~65 nm along the fiber axes for samples prepared using templates having ~70 and ~330 nm average fiber diameters. Synthesized AlN hollow nanofibers were polycrystalline with a hexagonal crystal structure as determined by high-resolution TEM and selected area electron diffraction. Chemical compositions of coated and calcined samples were studied using X-ray photoelectron spectroscopy (XPS). High-resolution XPS spectra confirmed the presence of AlN. © 2012 The American Ceramic Societyen_US
dc.language.isoEnglishen_US
dc.source.titleJournal of the American Ceramic Societyen_US
dc.relation.isversionofhttp://dx.doi.org/10.1111/jace.12030en_US
dc.rightsCopyright © 2012 American Ceramic Societyen_US
dc.subjectAluminum nitride (AlN); Average fiber diameters; Chemical compositions; Hexagonal crystal structure; Plasma-enhanced atomic layer deposition; Polymeric nanofibers; Selected area electron diffraction; Template-based synthesis Engineering controlled terms: Aluminum nitride; Calcination; Deposition; Electron diffraction; Fibers; Photoelectrons; Polymers; X ray photoelectron spectroscopy Engineering main heading: Nanofibersen_US
dc.titleTemplate-based synthesis of aluminum nitride hollow Nanofibers via plasma-enhanced atomic layer depositionen_US
dc.typeArticleen_US
dc.departmentInstitute of Materials Science and Nanotechnologyen_US
dc.citation.spage916en_US
dc.citation.epage916en_US
dc.citation.volumeNumber96en_US
dc.citation.issueNumber3en_US
dc.instituteInstitute of Materials Science and Nanotechnologyen_US
dc.identifier.doi10.1111/jace.12030en_US
dc.publisherAmerican Ceramic Societyen_US


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