• About
  • Policies
  • What is openaccess
  • Library
  • Contact
Advanced search
      View Item 
      •   BUIR Home
      • Scholarly Publications
      • Faculty of Engineering
      • Department of Electrical and Electronics Engineering
      • View Item
      •   BUIR Home
      • Scholarly Publications
      • Faculty of Engineering
      • Department of Electrical and Electronics Engineering
      • View Item
      JavaScript is disabled for your browser. Some features of this site may not work without it.

      Zinc-oxide charge trapping memory cell with ultra-thin chromium-oxide trapping layer

      Thumbnail
      View / Download
      918.6 Kb
      Author
      El Atab, N.
      Rizk, A.
      Okyay, Ali Kemal
      Nayfeh, A.
      Date
      2013-11-13
      Source Title
      AIP Advances
      Print ISSN
      2158-3226
      Publisher
      AIP Publishing
      Volume
      3
      Issue
      11
      Pages
      112 - 116
      Language
      English
      Type
      Article
      Item Usage Stats
      120
      views
      84
      downloads
      Abstract
      A functional zinc-oxide based SONOS memory cell with ultra-thin chromium oxide trapping layer was fabricated. A 5 nm CrO2 layer is deposited between Atomic Layer Deposition (ALD) steps. A threshold voltage (Vt) shift of 2.6V was achieved with a 10V programming voltage. Also for a 2V Vt shift, the memory with CrO2 layer has a low programming voltage of 7.2V. Moreover, the deep trapping levels in CrO2 layer allows for additional scaling of the tunnel oxide due to an increase in the retention time. In addition, the structure was simulated using Physics Based TCAD. The results of the simulation fit very well with the experimental results providing an understanding of the charge trapping and tunneling physics. © 2013 Author(s)
      Keywords
      Programming Voltage
      Retention Time
      Sonos Memory Cell
      Trapping Layers
      Trapping Levels
      Tunnel Oxides
      Permalink
      http://hdl.handle.net/11693/12898
      Published Version (Please cite this version)
      http://dx.doi.org/10.1063/1.4832237
      Collections
      • Department of Electrical and Electronics Engineering 3524
      Show full item record

      Browse

      All of BUIRCommunities & CollectionsTitlesAuthorsAdvisorsBy Issue DateKeywordsTypeDepartmentsThis CollectionTitlesAuthorsAdvisorsBy Issue DateKeywordsTypeDepartments

      My Account

      Login

      Statistics

      View Usage StatisticsView Google Analytics Statistics

      Bilkent University

      If you have trouble accessing this page and need to request an alternate format, contact the site administrator. Phone: (312) 290 1771
      Copyright © Bilkent University - Library IT

      Contact Us | Send Feedback | Off-Campus Access | Admin | Privacy