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dc.contributor.authorMinne, S. C.en_US
dc.contributor.authorYaralioglu, G.en_US
dc.contributor.authorManalis, S. R.en_US
dc.contributor.authorAdams, J. D.en_US
dc.contributor.authorZesch, J.en_US
dc.contributor.authorAtalar, A.en_US
dc.contributor.authorQuate, C. F.en_US
dc.date.accessioned2015-07-28T11:56:29Z
dc.date.available2015-07-28T11:56:29Z
dc.date.issued1998-05-04en_US
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/11693/10995
dc.description.abstractAn expandable system has been developed to operate multiple probes for the atomic force microscope in parallel at high speeds. The combined improvements from parallelism and enhanced tip speed in this system represent an increase in throughput by over two orders of magnitude. A modular cantilever design has been replicated to produce an array of 50 cantilevers with a 200 μm pitch. This design contains a dedicated integrated sensor and integrated actuator where the cells can be repeated indefinitely. Electrical shielding within the array virtually eliminates coupling between the actuators and sensors. The reduced coupling simplifies the control electronics, facilitating the design of a computer system to automate the parallel high-speed arrays. This automated system has been applied to four cantilevers within the array of 50 cantilevers, with a 20 kHz bandwidth and a noise level of less than 50 Å. For typical samples, this bandwidth allows us to scan the probes at 4 mm/s.en_US
dc.language.isoEnglishen_US
dc.source.titleApplied Physics Lettersen_US
dc.relation.isversionofhttp://dx.doi.org/10.1063/1.121353en_US
dc.subjectSiliconen_US
dc.titleAutomated parallel high-speed atomic force microscopyen_US
dc.typeArticleen_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentInstitute of Materials Science and Nanotechnologyen_US
dc.citation.spage2340en_US
dc.citation.epage2342en_US
dc.citation.volumeNumber72en_US
dc.citation.issueNumber18en_US
dc.identifier.doi10.1063/1.121353en_US
dc.publisherA I P Publishing LLCen_US


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