A sensitive detection method for capacitive ultrasonic transducers
Ergun, A. S.
Applied Physics Letters
American Institute of Physics
Ergun, A. S., Atalar, A., Temelkuran, B., & Ozbay, E. (1998). A sensitive detection method for capacitive ultrasonic transducers. Applied physics letters, 72(23), 2957-2959.
Please cite this item using this persistent URLhttp://hdl.handle.net/11693/10972
We report a sensitive detection method for capacitive ultrasonic transducers. Detection experiments at 1.6 MHz reveal a minimum detectable displacement around 2.5 x 10(-4) Angstrom/root Hz. The devices are fabricated on silicon using surface micromachining techniques. We made use of microwave circuit considerations to obtain a good displacement sensitivity. Our method also eliminates the dependence of the sensitivity on the ultrasound frequency, allowing the method to be used at low audio frequency and static displacement sensing applications. (C) 1998 American Institute of Physics.