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      Micromachinable ultrasonic leaky wave air transducers

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      Author
      Degertekin, F. L.
      Atalar, Abdullah
      Khuri-Yakub, B. T.
      Date
      1998-08-10
      Source Title
      Applied Physics Letters
      Print ISSN
      0003-6951
      Publisher
      A I P Publishing LLC
      Volume
      73
      Issue
      6
      Pages
      741 - 743
      Language
      English
      Type
      Article
      Item Usage Stats
      137
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      126
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      Abstract
      Ultrasonic air transducers using leaky waves on thin membranes are analyzed using perturbation and normal mode approaches. The transducers utilize the efficient coupling of ultrasonic energy to air through radiation of these leaky wave modes when their phase velocity is close to the sound speed in air. Theoretical results on optimum transducer dimensions and bandwidth estimation show that a minimum conversion loss of 8.7 dB with a 78% fractional bandwidth is possible. Common micromachining materials are shown to be suitable transducer materials and result in feasible devices. This is demonstrated by fabricating a 580 kHz transducer using a silicon membrane bonded to a ring of PZT-5H. With this configuration the transducer is self line focusing. Results of through transmission experiments on silicon and transmission images on paper are reported.
      Keywords
      Ultrasonic air transducers
      Leaky wave
      Permalink
      http://hdl.handle.net/11693/10928
      Published Version (Please cite this version)
      http://dx.doi.org/10.1063/1.121986
      Collections
      • Department of Electrical and Electronics Engineering 3597
      • Institute of Materials Science and Nanotechnology (UNAM) 1831
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