Now showing items 1-5 of 5
A new detection method for capacitive micromachine ultrasonic transducers
Capacitive micromachine ultrasonic transducers (cMUT) have become an alternative to piezoelectric transducers in the past few years. They consist of many small circular membranes that are connected in parallel. In this ...
Wafer bonded capacitive micromachined underwater transducers
In this work we have designed, fabricated and tested CMUTs as underwater transducers. Single CMUT membranes with three different radii and 380 microns of thickness are fabricated for the demonstration of an underwater CMUT ...
Design charts to maximize the gain-bandwidth product of capacitive micromachined ultrasonic transducers
In this work we define a performance measure for capacitive micromachined ultrasonic transducers (cMUT) in the form of a gain-bandwidth product to investigate the conditions that optimize the gain and bandwidth with respect ...
Experimental characterization of capacitive micromachined ultrasonic transducers
In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive ...
Improved performance of cMUT with nonuniform membranes
When capacitive micromachined ultrasonic transducers are immersed in water, the bandwidth of the device is limited by the membrane's second resonance frequency. At this frequency no mechanical power to immersion medium can ...