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Analytic modeling of loss and cross-coupling in capacitive micromachined ultrasonic transducers
(IEEE, Piscataway, NJ, United States, 1998)
The structural loss mechanism of capacitive micromachined ultrasonic transducer (cMUT) is investigated using finite element analysis and the normal mode theory. A single micromachined transducer membrane on an infinite ...
Micromachinable leaky wave air transducers
In this paper, ultrasonic air transducers which use the lowest order antisymmetric (A/sub 0/) mode Lamb waves in a thin plate as a means of efficient coupling of ultrasonic energy to air are discussed. For a silicon plate ...
Microfabricated ultrasonic transducers: towards robust models and immersion devices
The successful fabrication of ultrasonic immersion transducers is reported. Transducers are observed to operate from 1 MHz to 20 MHz in water, with the frequency range limited by electronics, not the transducers. Transmission ...