In this work we have designed, fabricated and tested CMUTs as underwater transducers. Single CMUT membranes with three different radii and 380 microns of thickness are fabricated for the demonstration of an underwater CMUT ...

In this paper, we present equivalent circuit for immersed capacitive micromachined ultrasonic transducers (cMUT), based on an accurate parametric model. We also present an accurate approximation for the radiation impedance ...

A capacitive micromachined ultrasonic transducer (cMUT) is typically fabricated by concatenation of several cMUT cells with identical physical dimensions. If the membrane thickness is kept fixed, the radius of the cMUT ...

In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive ...

In this study, we explore the limits of cMUTs in air-borne applications. First we investigate the ways of increasing the bandwidth of a single cMUT cell in air. The effect of array operation is also considered in order to ...

Capacitive micromachined ultrasonic transducers (cMUTs) offer wider bandwidth in air due to their low mechanical impedances. The impedance mismatch between the air and transducer decreases with the smaller device dimensions ...

In this paper, we present how a capacitive micromachined ultrasonic transducer (cMUT) couples to the immersion medium, based on an accurate parametric model. We show that the velocity of cMUT membrane can be written as a ...

When capacitive micromachined ultrasonic transducers are immersed in water, the bandwidth of the device is limited by the membrane's second resonance frequency. At this frequency no mechanical power to immersion medium can ...