In this paper, we have fabricated an optical cantilever with an integrated grating coupler. We have used an inexpensive and repeatable method for integrating the grating to the silicon cantilever with a microfabrication ...

We present a micromachined scanning probe cantilever, in which a specific higher order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have demonstrated that ...

A new procedure for high‐speed imaging with the atomic force microscope that combines an integrated ZnO piezoelectric actuator with an optical lever sensor has yielded an imaging bandwidth of 33 kHz. This bandwidth is ...

We present a sensor for the atomic force microscope (AFM) where a silicon cantilever is micromachined into the shape of interdigitated fingers that form a diffraction grating. When detecting a force, alternating fingers ...

We present a micromachined scanning probe cantilever, in which a specific higher-order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have fabricated such ...

Higher harmonics in tapping-mode atomic force microscopy offers the potential for imaging and sensing material properties at the nanoscale. The signal level at a given harmonic of the fundamental mode can be enhanced if ...

We present a model predicting the effects of mechanical defects at layer interfaces on the contact stiffness measured by ultrasonic atomic force microscopy sAFMd. Defects at subsurface interfaces result in changes at the ...

In a tapping-mode atomic force microscope, a power is dissipated in the sample during the imaging process. While the vibrating tip taps on the sample surface, some part of its energy is coupled to the sample. Too much ...

In a tapping-mode atomic force microscope, the frequency spectrum of the oscillating cantilever contains higher harmonics at integer multiples of the excitation frequency. When the cantilever oscillates at its fundamental ...