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Deep-collapse operation of capacitive micromachined ultrasonic transducers
(IEEE, 2011)
Capacitive micromachined ultrasonic transducers (CMUTs) have been introduced as a promising technology for ultrasound imaging and therapeutic ultrasound applications which require high transmitted pressures for increased ...
Nonlinear modeling of an immersed transmitting capacitive micromachined ultrasonic transducer for harmonic balance analysis
(IEEE, 2010)
Finite element method (FEM) is used for transient dynamic analysis of capacitive micromachined ultrasonic transducers (CMUT) and is particularly useful when the membranes are driven in the nonlinear regime. One major ...
Reducing anchor loss in micromechanical extensional Mode resonators
(IEEE, 2010-02)
In this work, we propose a novel method to increase
the quality factor of extensional mode micromechanical
resonators. The proposed resonator topology is suitable for
integration in a silicon-based process to fabricate ...
An improved lumped element nonlinear circuit model for a circular CMUT cell
(IEEE, 2012)
This paper describes a correction and an extension in the previously published large signal equivalent circuit model for a circular capacitive micromachined ultrasonic transducer (CMUT) cell. The force model is rederived ...
Optimization of the gain-bandwidth product of capacitive micromachined ultrasonic transducers
(IEEE, 2005-12)
Capacitive micromachined ultrasonic transducers (cMUT) have large bandwidths, but they typically have low conversion efficiencies. This paper defines a performance
measure in the form of a gain-bandwidth product and ...
Radiation impedance of an array of circular capacitive micromachined ultrasonic transducers
(IEEE, 2010)
The radiation impedance of a capacitive micromachined ultrasonic transducer (cMUT) with a circular membrane is calculated analytically using its velocity profile for the frequencies up to its parallel resonance frequency ...
Parametric linear modeling of circular cMUT membranes in vacuum
(Institute of Electrical and Electronics Engineers, 2007)
We present a lumped element parametric model for the clamped circular membrane of a capacitive micromachined ultrasonic transducer (cMUT). The model incorporates an electrical port and two sets of acoustic ports, through ...
An equivalent circuit model for transmitting capacitive micromachined ultrasonic transducers in collapse mode
(IEEE, 2011)
The collapse mode of operation of capacitive micromachined ultrasonic transducers (CMUTs) was shown to be a very effective way to achieve high output pressures. However, no accurate analytical or equivalent circuit model ...
High Power CMUTs: design and experimental verification
(IEEE, 2012)
Capacitive micromachined ultrasonic transducers
(CMUTs) have great potential to compete with piezoelectric
transducers in high-power applications. As the output pressures
increase, nonlinearity of CMUT must be ...