Now showing items 1-10 of 10
Centimeter scale atomic force microscope imaging and lithography
(A I P Publishing LLC, 1998-09-21)
We present a 4 mm2 image taken with a parallel array of 10 cantilevers, an image spanning 6.4 mm taken with 32 cantilevers, and lithography over a 100 mm2 area using an array of 50 cantilevers. All of these results represent ...
Automated parallel high-speed atomic force microscopy
(A I P Publishing LLC, 1998-05-04)
An expandable system has been developed to operate multiple probes for the atomic force microscope in parallel at high speeds. The combined improvements from parallelism and enhanced tip speed in this system represent an ...
Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor
(A I P Publishing LLC, 1996-01)
Using an atomic force microscope (AFM) with a silicon cantilever partially covered with a layer of zinc oxide (ZnO), we have imaged in the constant force mode by employing the ZnO as both a sensor and actuator. The cantilever ...
Interdigital cantilevers for atomic force microscopy
(A I P Publishing LLC, 1996-10)
We present a sensor for the atomic force microscope (AFM) where a silicon cantilever is micromachined into the shape of interdigitated fingers that form a diffraction grating. When detecting a force, alternating fingers ...
Parallel atomic force microscopy with optical interferometric detection
(American Institute of Physics, 2001-01-05)
We have developed an atomic force microscope that uses interferometry for parallel readout of a cantilever array. Each cantilever contains a phase sensitive diffraction grating consisting of a reference and movable set of ...
High‐speed atomic force microscopy using an integrated actuator and optical lever detection
(A I P Publishing LLC, 1996-09)
A new procedure for high‐speed imaging with the atomic force microscope that combines an integrated ZnO piezoelectric actuator with an optical lever sensor has yielded an imaging bandwidth of 33 kHz. This bandwidth is ...
Two-dimensional micromechanical bimorph arrays for detection of thermal radiation
(American Institute of Physics, 1997-06-16)
We demonstrate that two-dimensional arrays of micromechanical bimorphs can be used as thermal sensors to image infrared (IR) radiation. A density of 100 pixels per mm2 is achieved by coiling a bimorph beam into the shape ...
Analysis and design of an interdigital cantilever as a displacement sensor
(A I P Publishing LLC, 1998-06-15)
The interdigital (ID) cantilever with two sets of interleaving fingers is an alternative to the conventional cantilever used in the atomic force microscope (AFM). In this paper we present a detailed analysis of the ...
High throughput, high resolution scanning probe microscopy
(Technology Publishing Ltd., 1998)
Independent parallel lithography using the atomic force microscope
(A I P Publishing LLC, 1996-05)
Independent parallel features have been lithographically patterned with a 2×1 array of individually controlled cantilevers using an atomic force microscope. Control of the individual cantilevers was achieved with an ...