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An optical microcantilever with integrated grating coupler
In this paper, we have fabricated an optical cantilever with an integrated grating coupler. We have used an inexpensive and repeatable method for integrating the grating to the silicon cantilever with a microfabrication ...
High‐speed atomic force microscopy using an integrated actuator and optical lever detection
(A I P Publishing LLC, 1996-09)
A new procedure for high‐speed imaging with the atomic force microscope that combines an integrated ZnO piezoelectric actuator with an optical lever sensor has yielded an imaging bandwidth of 33 kHz. This bandwidth is ...