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An optical microcantilever with integrated grating coupler
In this paper, we have fabricated an optical cantilever with an integrated grating coupler. We have used an inexpensive and repeatable method for integrating the grating to the silicon cantilever with a microfabrication ...
Interdigital cantilevers for atomic force microscopy
(A I P Publishing LLC, 1996-10)
We present a sensor for the atomic force microscope (AFM) where a silicon cantilever is micromachined into the shape of interdigitated fingers that form a diffraction grating. When detecting a force, alternating fingers ...