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High‐speed atomic force microscopy using an integrated actuator and optical lever detection
(A I P Publishing LLC, 1996-09)
A new procedure for high‐speed imaging with the atomic force microscope that combines an integrated ZnO piezoelectric actuator with an optical lever sensor has yielded an imaging bandwidth of 33 kHz. This bandwidth is ...
Interdigital cantilevers for atomic force microscopy
(A I P Publishing LLC, 1996-10)
We present a sensor for the atomic force microscope (AFM) where a silicon cantilever is micromachined into the shape of interdigitated fingers that form a diffraction grating. When detecting a force, alternating fingers ...