Browsing by Keywords "Strontium titanate (SrTiO3)"

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Effect of O2/Ar flow ratio and post-deposition annealing on the structural, optical and electrical characteristics of SrTiO3 thin films deposited by RF sputtering at room temperature

Goldenberg, E.; Bayrak, T.; Ozgit Akgun, C.; Haider A.; Leghari, S.A.; Kumar, M.; Bıyıklı, Necmi (Elsevier, 2015)

SrTiO3 (STO) thin films have been prepared by reactive RF magnetron sputtering on Si (100) and UV fused silica substrates at room temperature. The effect of oxygen flow on film characteristics was investigated at a total ...