Browsing by Keywords "Silicon oxynitride film"

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    • An elastomeric grating coupler 

      Kocabas, A.; Ay, F.; Dâna, A.; Aydınlı, Atilla (IOP Institute of Physics, 2006)
      We report on a novel nondestructive and reversible method for coupling free space light to planar optical waveguides. In this method, an elastomeric grating is used to produce an effective refractive index modulation on ...

    • Structural and loss characterization of SiON layers for optical waveguide applications 

      Ay, Feridun; Aydınlı, Atilla; Roeloffzen, C.; Driessen, A. (IEEE, 2000)
      Silicon oxynitride films for optical waveguide applications were grown at 350°C in a PECVD reactor. ATR-FTIR spectroscopy was used to identify the bond structure and absorption characteristics in the mid-infrared region. ...