Browsing by Keywords "Silicon oxide"
Now showing items 1-3 of 3
-
Comparative investigation og hydrogen bonding in silicon based PECVD grown dielectrics for optical
(Elsevier, 2004-06)Silicon oxide, silicon nitride and silicon oxynitride layers were grown by a PECVD technique. The resulting refractive indices of the layers varied between 1.47 and 1.93. The compositional properties of the layers were ... -
Differentiation of domains in composite surface structures by charge-contrast x-ray photoelectron spectroscopy
(2007)An external bias is applied to two samples containing composite surface structures, while recording an XPS spectrum. Altering the polarity of the bias affects the extent of differential charging in domains that are chemically ... -
Silicon based dielectrics : growth, characterization, and applications in integrated optics
(Bilkent University, 2005)In recent years, growing attention has been paid to silicon based dielectrics, such as silicon oxynitrides, silicon nitrides, and semiconductor doped silicon oxides, all combined under the name silica on silicon technology. ...
