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    • Design of a high-resolution microfluidic microwave MEMS phase shifter 

      Ozbey, B.; Ozturk, S.; Aktas, O. (Wiley, 2011)
      In this article, a novel microwave microelectromechanical phase shifter based on a microfluidic design is proposed and demonstrated. The design principles, the fabrication process, and experimental results (S-parameters ...