Browsing by Keywords "Nano-positioning"

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Design and analysis of a modular learning based cross-coupled control algorithm for multi-axis precision positioning systems

Ulu, N. G.; Ulu E.; Cakmakci, M. (Institute of Control, Robotics and Systems, 2016)

Increasing demand for micro/nano-technology related equipment resulted in growing interest for precision positioning systems. In this paper a modular controller combining cross-coupled control and iterative learning control ...