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    • Ge nanocrystals embedded in ultrathin Si3N4 multilayers with SiO2 barriers 

      Bahariqushchi R.; Gundogdu S.; Aydinli A. (Academic Press, 2017)
      Multilayers of germanium nanocrystals (NCs) embedded in thin films of silicon nitride matrix separated with SiO2 barriers have been fabricated using plasma enhanced chemical vapor deposition (PECVD). SiGeN/SiO2 alternating ...