Now showing items 1-2 of 2

    • Low-voltage small-size double-arm MEMS actuator 

      Bıyıklı, Necmi; Damgaci, Y.; Cetiner, B.A. (2009)
      The fabrication and characterisation of a double-arm cantilever-type metallic DC-contact MEMS actuator with low pull-down voltage are reported. Bi-layer TiW cantilevers with an internal stress gradient were fabricated using ...
    • Nanoelectromechanical switches for reconfigurable antennas 

      Cetiner, B.A.; Bıyıklı, Necmi; Yildirim, B.S.; Damgaci, Y. (2010)
      We report on the full-wave analyses of a frequency reconfigurable antenna integrated with metallic nanoelectromechanical system (NEMS) switches (length = 3 μm, width = 60 nm). The NEMS switch used in this work has the same ...